5/1/2012	12:18:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	12:18:12 PM	Recipe started at 12:18 PM
5/1/2012	12:18:12 PM	Helium valve closed
5/1/2012	12:18:12 PM	H2 valve closed
5/1/2012	12:18:12 PM	BCl3 valve closed
5/1/2012	12:18:12 PM	PH3 valve closed
5/1/2012	12:18:12 PM	SiCl4 pre valve closed
5/1/2012	12:18:12 PM	SiCl4 post valve closed
5/1/2012	12:18:12 PM	Main Vac valve closed
5/1/2012	12:18:12 PM	Bypass valve closed
5/1/2012	12:18:12 PM	Bubbler valve closed
5/1/2012	12:18:12 PM	Helium MFC set to  0.000000
5/1/2012	12:18:12 PM	H2 MFC set to  0.000000
5/1/2012	12:18:12 PM	BCl3 MFC set to  0.000000
5/1/2012	12:18:12 PM	PH3 MFC set to  0.000000
5/1/2012	12:18:12 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:18:12 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:18:12 PM	Tube furnace set to 0
5/1/2012	12:18:15 PM	H2 valve closed
5/1/2012	12:18:15 PM	BCl3 valve closed
5/1/2012	12:18:15 PM	PH3 valve closed
5/1/2012	12:18:15 PM	SiCl4 pre valve closed
5/1/2012	12:18:15 PM	SiCl4 post valve closed
5/1/2012	12:18:15 PM	Main Vac valve closed
5/1/2012	12:18:15 PM	Bypass valve closed
5/1/2012	12:18:15 PM	Bubbler valve closed
5/1/2012	12:18:15 PM	Helium valve opened
5/1/2012	12:18:15 PM	Helium MFC set to  500.000000
5/1/2012	12:18:15 PM	H2 MFC set to  0.000000
5/1/2012	12:18:15 PM	BCl3 MFC set to  0.000000
5/1/2012	12:18:15 PM	PH3 MFC set to  0.000000
5/1/2012	12:18:15 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:18:15 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:18:15 PM	Tube furnace set to 0
5/1/2012	12:19:28 PM	Helium valve closed
5/1/2012	12:19:28 PM	H2 valve closed
5/1/2012	12:19:28 PM	BCl3 valve closed
5/1/2012	12:19:28 PM	PH3 valve closed
5/1/2012	12:19:28 PM	SiCl4 pre valve closed
5/1/2012	12:19:28 PM	SiCl4 post valve closed
5/1/2012	12:19:28 PM	Main Vac valve closed
5/1/2012	12:19:28 PM	Bypass valve closed
5/1/2012	12:19:28 PM	Bubbler valve closed
5/1/2012	12:19:28 PM	Helium MFC set to  0.000000
5/1/2012	12:19:28 PM	H2 MFC set to  0.000000
5/1/2012	12:19:28 PM	BCl3 MFC set to  0.000000
5/1/2012	12:19:28 PM	PH3 MFC set to  0.000000
5/1/2012	12:19:28 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:19:28 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:19:28 PM	Tube furnace set to 0
5/1/2012	12:19:29 PM	Run finished at 12:19 PM
5/1/2012	12:19:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	12:22:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	12:22:39 PM	Recipe started at 12:22 PM
5/1/2012	12:22:40 PM	Helium valve closed
5/1/2012	12:22:40 PM	H2 valve closed
5/1/2012	12:22:40 PM	BCl3 valve closed
5/1/2012	12:22:40 PM	PH3 valve closed
5/1/2012	12:22:40 PM	SiCl4 pre valve closed
5/1/2012	12:22:40 PM	SiCl4 post valve closed
5/1/2012	12:22:40 PM	Main Vac valve closed
5/1/2012	12:22:40 PM	Bubbler valve closed
5/1/2012	12:22:40 PM	Bypass valve opened
5/1/2012	12:22:40 PM	Helium MFC set to  0.000000
5/1/2012	12:22:40 PM	H2 MFC set to  0.000000
5/1/2012	12:22:40 PM	BCl3 MFC set to  0.000000
5/1/2012	12:22:40 PM	PH3 MFC set to  0.000000
5/1/2012	12:22:40 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:22:40 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:22:40 PM	Tube furnace set to 0
5/1/2012	12:24:10 PM	Run aborted at 12:24 PM
5/1/2012	12:24:10 PM	Helium valve closed
5/1/2012	12:24:10 PM	H2 valve closed
5/1/2012	12:24:10 PM	BCl3 valve closed
5/1/2012	12:24:10 PM	PH3 valve closed
5/1/2012	12:24:10 PM	SiCl4 pre valve closed
5/1/2012	12:24:10 PM	SiCl4 post valve closed
5/1/2012	12:24:10 PM	Bypass valve closed
5/1/2012	12:24:10 PM	Main Vac valve closed
5/1/2012	12:24:11 PM	Bubbler valve closed
5/1/2012	12:24:11 PM	Helium MFC set to  0.000000
5/1/2012	12:24:11 PM	H2 MFC set to  0.000000
5/1/2012	12:24:11 PM	BCl3 MFC set to  0.000000
5/1/2012	12:24:11 PM	PH3 MFC set to  0.000000
5/1/2012	12:24:11 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:24:11 PM	Tube furnace set to 0
5/1/2012	12:24:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	12:24:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	12:24:14 PM	Recipe started at 12:24 PM
5/1/2012	12:24:14 PM	Helium valve closed
5/1/2012	12:24:14 PM	H2 valve closed
5/1/2012	12:24:14 PM	BCl3 valve closed
5/1/2012	12:24:14 PM	PH3 valve closed
5/1/2012	12:24:14 PM	SiCl4 pre valve closed
5/1/2012	12:24:14 PM	SiCl4 post valve closed
5/1/2012	12:24:14 PM	Main Vac valve closed
5/1/2012	12:24:14 PM	Bypass valve closed
5/1/2012	12:24:14 PM	Bubbler valve closed
5/1/2012	12:24:14 PM	Helium MFC set to  0.000000
5/1/2012	12:24:14 PM	H2 MFC set to  0.000000
5/1/2012	12:24:14 PM	BCl3 MFC set to  0.000000
5/1/2012	12:24:14 PM	PH3 MFC set to  0.000000
5/1/2012	12:24:14 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:24:14 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:24:14 PM	Tube furnace set to 0
5/1/2012	12:24:17 PM	H2 valve closed
5/1/2012	12:24:17 PM	BCl3 valve closed
5/1/2012	12:24:17 PM	PH3 valve closed
5/1/2012	12:24:17 PM	SiCl4 pre valve closed
5/1/2012	12:24:17 PM	SiCl4 post valve closed
5/1/2012	12:24:17 PM	Main Vac valve closed
5/1/2012	12:24:17 PM	Bypass valve closed
5/1/2012	12:24:17 PM	Bubbler valve closed
5/1/2012	12:24:17 PM	Helium valve opened
5/1/2012	12:24:17 PM	Helium MFC set to  500.000000
5/1/2012	12:24:17 PM	H2 MFC set to  0.000000
5/1/2012	12:24:17 PM	BCl3 MFC set to  0.000000
5/1/2012	12:24:17 PM	PH3 MFC set to  0.000000
5/1/2012	12:24:17 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:24:17 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:24:17 PM	Tube furnace set to 0
5/1/2012	12:24:45 PM	Helium valve closed
5/1/2012	12:24:45 PM	H2 valve closed
5/1/2012	12:24:45 PM	BCl3 valve closed
5/1/2012	12:24:45 PM	PH3 valve closed
5/1/2012	12:24:45 PM	SiCl4 pre valve closed
5/1/2012	12:24:45 PM	SiCl4 post valve closed
5/1/2012	12:24:45 PM	Main Vac valve closed
5/1/2012	12:24:45 PM	Bypass valve closed
5/1/2012	12:24:45 PM	Bubbler valve closed
5/1/2012	12:24:45 PM	Helium MFC set to  0.000000
5/1/2012	12:24:45 PM	H2 MFC set to  0.000000
5/1/2012	12:24:45 PM	BCl3 MFC set to  0.000000
5/1/2012	12:24:45 PM	PH3 MFC set to  0.000000
5/1/2012	12:24:45 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:24:45 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:24:46 PM	Tube furnace set to 0
5/1/2012	12:24:47 PM	Run finished at 12:24 PM
5/1/2012	12:24:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	12:26:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	12:26:49 PM	Recipe started at 12:26 PM
5/1/2012	12:26:49 PM	Helium valve closed
5/1/2012	12:26:49 PM	H2 valve closed
5/1/2012	12:26:49 PM	BCl3 valve closed
5/1/2012	12:26:49 PM	PH3 valve closed
5/1/2012	12:26:49 PM	SiCl4 pre valve closed
5/1/2012	12:26:49 PM	SiCl4 post valve closed
5/1/2012	12:26:49 PM	Main Vac valve closed
5/1/2012	12:26:49 PM	Bubbler valve closed
5/1/2012	12:26:49 PM	Bypass valve opened
5/1/2012	12:26:49 PM	Helium MFC set to  0.000000
5/1/2012	12:26:49 PM	H2 MFC set to  0.000000
5/1/2012	12:26:49 PM	BCl3 MFC set to  0.000000
5/1/2012	12:26:49 PM	PH3 MFC set to  0.000000
5/1/2012	12:26:49 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:26:49 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:26:49 PM	Tube furnace set to 0
5/1/2012	12:28:09 PM	Helium valve closed
5/1/2012	12:28:09 PM	H2 valve closed
5/1/2012	12:28:09 PM	BCl3 valve closed
5/1/2012	12:28:09 PM	PH3 valve closed
5/1/2012	12:28:09 PM	SiCl4 pre valve closed
5/1/2012	12:28:09 PM	SiCl4 post valve closed
5/1/2012	12:28:09 PM	Main Vac valve closed
5/1/2012	12:28:09 PM	Bubbler valve closed
5/1/2012	12:28:09 PM	Bypass valve opened
5/1/2012	12:28:09 PM	Helium MFC set to  0.000000
5/1/2012	12:28:09 PM	H2 MFC set to  0.000000
5/1/2012	12:28:09 PM	BCl3 MFC set to  0.000000
5/1/2012	12:28:09 PM	PH3 MFC set to  0.000000
5/1/2012	12:28:09 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:28:09 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:28:09 PM	Tube furnace set to 0
5/1/2012	12:29:09 PM	Helium valve closed
5/1/2012	12:29:09 PM	H2 valve closed
5/1/2012	12:29:10 PM	BCl3 valve closed
5/1/2012	12:29:10 PM	PH3 valve closed
5/1/2012	12:29:10 PM	SiCl4 pre valve closed
5/1/2012	12:29:10 PM	SiCl4 post valve closed
5/1/2012	12:29:10 PM	Bypass valve closed
5/1/2012	12:29:10 PM	Bubbler valve closed
5/1/2012	12:29:10 PM	Main Vac valve opened
5/1/2012	12:29:10 PM	Helium MFC set to  0.000000
5/1/2012	12:29:10 PM	H2 MFC set to  0.000000
5/1/2012	12:29:10 PM	BCl3 MFC set to  0.000000
5/1/2012	12:29:10 PM	PH3 MFC set to  0.000000
5/1/2012	12:29:10 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:29:10 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:29:10 PM	Tube furnace set to 0
5/1/2012	12:29:11 PM	Run finished at 12:29 PM
5/1/2012	12:29:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	12:29:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	12:29:55 PM	Recipe started at 12:29 PM
5/1/2012	12:29:55 PM	Helium valve closed
5/1/2012	12:29:55 PM	H2 valve closed
5/1/2012	12:29:55 PM	BCl3 valve closed
5/1/2012	12:29:55 PM	PH3 valve closed
5/1/2012	12:29:55 PM	SiCl4 pre valve closed
5/1/2012	12:29:55 PM	SiCl4 post valve closed
5/1/2012	12:29:55 PM	Main Vac valve closed
5/1/2012	12:29:55 PM	Bypass valve closed
5/1/2012	12:29:55 PM	Bubbler valve closed
5/1/2012	12:29:55 PM	Helium MFC set to  0.000000
5/1/2012	12:29:55 PM	H2 MFC set to  0.000000
5/1/2012	12:29:55 PM	BCl3 MFC set to  0.000000
5/1/2012	12:29:55 PM	PH3 MFC set to  0.000000
5/1/2012	12:29:55 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:29:55 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:29:55 PM	Tube furnace set to 0
5/1/2012	12:29:58 PM	H2 valve closed
5/1/2012	12:29:58 PM	BCl3 valve closed
5/1/2012	12:29:58 PM	PH3 valve closed
5/1/2012	12:29:58 PM	SiCl4 pre valve closed
5/1/2012	12:29:58 PM	SiCl4 post valve closed
5/1/2012	12:29:58 PM	Main Vac valve closed
5/1/2012	12:29:58 PM	Bypass valve closed
5/1/2012	12:29:58 PM	Bubbler valve closed
5/1/2012	12:29:58 PM	Helium valve opened
5/1/2012	12:29:58 PM	Helium MFC set to  500.000000
5/1/2012	12:29:58 PM	H2 MFC set to  0.000000
5/1/2012	12:29:58 PM	BCl3 MFC set to  0.000000
5/1/2012	12:29:58 PM	PH3 MFC set to  0.000000
5/1/2012	12:29:58 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:29:58 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:29:59 PM	Tube furnace set to 0
5/1/2012	12:31:10 PM	Helium valve closed
5/1/2012	12:31:10 PM	H2 valve closed
5/1/2012	12:31:10 PM	BCl3 valve closed
5/1/2012	12:31:10 PM	PH3 valve closed
5/1/2012	12:31:10 PM	SiCl4 pre valve closed
5/1/2012	12:31:10 PM	SiCl4 post valve closed
5/1/2012	12:31:10 PM	Main Vac valve closed
5/1/2012	12:31:10 PM	Bypass valve closed
5/1/2012	12:31:10 PM	Bubbler valve closed
5/1/2012	12:31:10 PM	Helium MFC set to  0.000000
5/1/2012	12:31:10 PM	H2 MFC set to  0.000000
5/1/2012	12:31:10 PM	BCl3 MFC set to  0.000000
5/1/2012	12:31:10 PM	PH3 MFC set to  0.000000
5/1/2012	12:31:10 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:31:10 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:31:11 PM	Tube furnace set to 0
5/1/2012	12:31:12 PM	Run finished at 12:31 PM
5/1/2012	12:31:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	12:33:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	12:33:57 PM	Recipe started at 12:33 PM
5/1/2012	12:33:57 PM	Helium valve closed
5/1/2012	12:33:57 PM	H2 valve closed
5/1/2012	12:33:57 PM	BCl3 valve closed
5/1/2012	12:33:57 PM	PH3 valve closed
5/1/2012	12:33:57 PM	SiCl4 pre valve closed
5/1/2012	12:33:57 PM	SiCl4 post valve closed
5/1/2012	12:33:57 PM	Main Vac valve closed
5/1/2012	12:33:57 PM	Bubbler valve closed
5/1/2012	12:33:57 PM	Bypass valve opened
5/1/2012	12:33:57 PM	Helium MFC set to  0.000000
5/1/2012	12:33:57 PM	H2 MFC set to  0.000000
5/1/2012	12:33:57 PM	BCl3 MFC set to  0.000000
5/1/2012	12:33:57 PM	PH3 MFC set to  0.000000
5/1/2012	12:33:57 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:33:57 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:33:58 PM	Tube furnace set to 0
5/1/2012	12:35:06 PM	Helium valve closed
5/1/2012	12:35:06 PM	H2 valve closed
5/1/2012	12:35:06 PM	BCl3 valve closed
5/1/2012	12:35:06 PM	PH3 valve closed
5/1/2012	12:35:06 PM	SiCl4 pre valve closed
5/1/2012	12:35:06 PM	SiCl4 post valve closed
5/1/2012	12:35:06 PM	Main Vac valve closed
5/1/2012	12:35:06 PM	Bubbler valve closed
5/1/2012	12:35:06 PM	Bypass valve opened
5/1/2012	12:35:06 PM	Helium MFC set to  0.000000
5/1/2012	12:35:06 PM	H2 MFC set to  0.000000
5/1/2012	12:35:06 PM	BCl3 MFC set to  0.000000
5/1/2012	12:35:06 PM	PH3 MFC set to  0.000000
5/1/2012	12:35:06 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:35:06 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:35:06 PM	Tube furnace set to 0
5/1/2012	12:36:06 PM	Helium valve closed
5/1/2012	12:36:06 PM	H2 valve closed
5/1/2012	12:36:06 PM	BCl3 valve closed
5/1/2012	12:36:06 PM	PH3 valve closed
5/1/2012	12:36:06 PM	SiCl4 pre valve closed
5/1/2012	12:36:06 PM	SiCl4 post valve closed
5/1/2012	12:36:06 PM	Bypass valve closed
5/1/2012	12:36:06 PM	Bubbler valve closed
5/1/2012	12:36:06 PM	Main Vac valve opened
5/1/2012	12:36:06 PM	Helium MFC set to  0.000000
5/1/2012	12:36:06 PM	H2 MFC set to  0.000000
5/1/2012	12:36:06 PM	BCl3 MFC set to  0.000000
5/1/2012	12:36:06 PM	PH3 MFC set to  0.000000
5/1/2012	12:36:06 PM	SiCl4 MFC set to  0.000000
5/1/2012	12:36:06 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	12:36:06 PM	Tube furnace set to 0
5/1/2012	12:36:07 PM	Run finished at 12:36 PM
5/1/2012	12:36:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	1:06:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/1/2012	1:06:59 PM	Recipe started at 1:06 PM
5/1/2012	1:06:59 PM	Helium valve closed
5/1/2012	1:06:59 PM	H2 valve closed
5/1/2012	1:06:59 PM	BCl3 valve closed
5/1/2012	1:06:59 PM	PH3 valve closed
5/1/2012	1:06:59 PM	SiCl4 pre valve closed
5/1/2012	1:06:59 PM	SiCl4 post valve closed
5/1/2012	1:06:59 PM	Main Vac valve closed
5/1/2012	1:06:59 PM	Bubbler valve closed
5/1/2012	1:06:59 PM	Bypass valve opened
5/1/2012	1:06:59 PM	Helium MFC set to  0.000000
5/1/2012	1:06:59 PM	H2 MFC set to  0.000000
5/1/2012	1:06:59 PM	BCl3 MFC set to  0.000000
5/1/2012	1:06:59 PM	PH3 MFC set to  0.000000
5/1/2012	1:06:59 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:06:59 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:06:59 PM	Tube furnace set to 0
5/1/2012	1:06:59 PM	Helium valve closed
5/1/2012	1:06:59 PM	H2 valve closed
5/1/2012	1:06:59 PM	BCl3 valve closed
5/1/2012	1:06:59 PM	PH3 valve closed
5/1/2012	1:06:59 PM	SiCl4 pre valve closed
5/1/2012	1:06:59 PM	SiCl4 post valve closed
5/1/2012	1:06:59 PM	Main Vac valve closed
5/1/2012	1:06:59 PM	Bubbler valve closed
5/1/2012	1:06:59 PM	Bypass valve opened
5/1/2012	1:06:59 PM	Helium MFC set to  0.000000
5/1/2012	1:06:59 PM	H2 MFC set to  0.000000
5/1/2012	1:06:59 PM	BCl3 MFC set to  0.000000
5/1/2012	1:06:59 PM	PH3 MFC set to  0.000000
5/1/2012	1:06:59 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:06:59 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:06:59 PM	Tube furnace set to 0
5/1/2012	1:07:01 PM	Helium valve closed
5/1/2012	1:07:01 PM	H2 valve closed
5/1/2012	1:07:01 PM	BCl3 valve closed
5/1/2012	1:07:01 PM	PH3 valve closed
5/1/2012	1:07:01 PM	SiCl4 pre valve closed
5/1/2012	1:07:01 PM	SiCl4 post valve closed
5/1/2012	1:07:01 PM	Bypass valve closed
5/1/2012	1:07:01 PM	Bubbler valve closed
5/1/2012	1:07:01 PM	Main Vac valve opened
5/1/2012	1:07:01 PM	Helium MFC set to  0.000000
5/1/2012	1:07:01 PM	H2 MFC set to  0.000000
5/1/2012	1:07:01 PM	BCl3 MFC set to  0.000000
5/1/2012	1:07:01 PM	PH3 MFC set to  0.000000
5/1/2012	1:07:01 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:07:01 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:07:01 PM	Tube furnace set to 0
5/1/2012	1:07:01 PM	H2 valve closed
5/1/2012	1:07:01 PM	BCl3 valve closed
5/1/2012	1:07:01 PM	PH3 valve closed
5/1/2012	1:07:01 PM	SiCl4 pre valve closed
5/1/2012	1:07:01 PM	SiCl4 post valve closed
5/1/2012	1:07:01 PM	Bypass valve closed
5/1/2012	1:07:01 PM	Bubbler valve closed
5/1/2012	1:07:01 PM	Helium valve opened
5/1/2012	1:07:02 PM	Main Vac valve opened
5/1/2012	1:07:02 PM	Helium MFC set to  20.000000
5/1/2012	1:07:02 PM	H2 MFC set to  0.000000
5/1/2012	1:07:02 PM	BCl3 MFC set to  0.000000
5/1/2012	1:07:02 PM	PH3 MFC set to  0.000000
5/1/2012	1:07:02 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:07:02 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:07:02 PM	Tube furnace set to 0
5/1/2012	1:07:32 PM	Helium valve closed
5/1/2012	1:07:32 PM	H2 valve closed
5/1/2012	1:07:32 PM	BCl3 valve closed
5/1/2012	1:07:32 PM	PH3 valve closed
5/1/2012	1:07:32 PM	SiCl4 pre valve closed
5/1/2012	1:07:32 PM	SiCl4 post valve closed
5/1/2012	1:07:32 PM	Bypass valve closed
5/1/2012	1:07:32 PM	Bubbler valve closed
5/1/2012	1:07:32 PM	Main Vac valve opened
5/1/2012	1:07:32 PM	Helium MFC set to  0.000000
5/1/2012	1:07:32 PM	H2 MFC set to  0.000000
5/1/2012	1:07:32 PM	BCl3 MFC set to  0.000000
5/1/2012	1:07:32 PM	PH3 MFC set to  0.000000
5/1/2012	1:07:32 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:07:32 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:07:32 PM	Tube furnace set to 0
5/1/2012	1:08:02 PM	H2 valve closed
5/1/2012	1:08:02 PM	BCl3 valve closed
5/1/2012	1:08:02 PM	PH3 valve closed
5/1/2012	1:08:02 PM	SiCl4 pre valve closed
5/1/2012	1:08:02 PM	SiCl4 post valve closed
5/1/2012	1:08:02 PM	Bypass valve closed
5/1/2012	1:08:02 PM	Bubbler valve closed
5/1/2012	1:08:02 PM	Helium valve opened
5/1/2012	1:08:02 PM	Main Vac valve opened
5/1/2012	1:08:02 PM	Helium MFC set to  20.000000
5/1/2012	1:08:02 PM	H2 MFC set to  0.000000
5/1/2012	1:08:02 PM	BCl3 MFC set to  0.000000
5/1/2012	1:08:02 PM	PH3 MFC set to  0.000000
5/1/2012	1:08:02 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:08:02 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:08:02 PM	Tube furnace set to 0
5/1/2012	1:08:32 PM	Helium valve closed
5/1/2012	1:08:32 PM	H2 valve closed
5/1/2012	1:08:32 PM	BCl3 valve closed
5/1/2012	1:08:32 PM	PH3 valve closed
5/1/2012	1:08:32 PM	SiCl4 pre valve closed
5/1/2012	1:08:32 PM	SiCl4 post valve closed
5/1/2012	1:08:32 PM	Bypass valve closed
5/1/2012	1:08:32 PM	Bubbler valve closed
5/1/2012	1:08:32 PM	Main Vac valve opened
5/1/2012	1:08:32 PM	Helium MFC set to  0.000000
5/1/2012	1:08:32 PM	H2 MFC set to  0.000000
5/1/2012	1:08:32 PM	BCl3 MFC set to  0.000000
5/1/2012	1:08:32 PM	PH3 MFC set to  0.000000
5/1/2012	1:08:32 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:08:32 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:08:32 PM	Tube furnace set to 0
5/1/2012	1:09:02 PM	H2 valve closed
5/1/2012	1:09:02 PM	BCl3 valve closed
5/1/2012	1:09:02 PM	PH3 valve closed
5/1/2012	1:09:02 PM	SiCl4 pre valve closed
5/1/2012	1:09:02 PM	SiCl4 post valve closed
5/1/2012	1:09:02 PM	Bypass valve closed
5/1/2012	1:09:02 PM	Bubbler valve closed
5/1/2012	1:09:02 PM	Helium valve opened
5/1/2012	1:09:02 PM	Main Vac valve opened
5/1/2012	1:09:02 PM	Helium MFC set to  20.000000
5/1/2012	1:09:02 PM	H2 MFC set to  0.000000
5/1/2012	1:09:02 PM	BCl3 MFC set to  0.000000
5/1/2012	1:09:02 PM	PH3 MFC set to  0.000000
5/1/2012	1:09:02 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:09:02 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:09:03 PM	Tube furnace set to 0
5/1/2012	1:09:33 PM	Helium valve closed
5/1/2012	1:09:33 PM	H2 valve closed
5/1/2012	1:09:33 PM	BCl3 valve closed
5/1/2012	1:09:33 PM	PH3 valve closed
5/1/2012	1:09:33 PM	SiCl4 pre valve closed
5/1/2012	1:09:33 PM	SiCl4 post valve closed
5/1/2012	1:09:33 PM	Bypass valve closed
5/1/2012	1:09:33 PM	Bubbler valve closed
5/1/2012	1:09:33 PM	Main Vac valve opened
5/1/2012	1:09:33 PM	Helium MFC set to  0.000000
5/1/2012	1:09:33 PM	H2 MFC set to  0.000000
5/1/2012	1:09:33 PM	BCl3 MFC set to  0.000000
5/1/2012	1:09:33 PM	PH3 MFC set to  0.000000
5/1/2012	1:09:33 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:09:33 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:09:33 PM	Tube furnace set to 0
5/1/2012	1:10:03 PM	H2 valve closed
5/1/2012	1:10:03 PM	BCl3 valve closed
5/1/2012	1:10:03 PM	PH3 valve closed
5/1/2012	1:10:03 PM	SiCl4 pre valve closed
5/1/2012	1:10:03 PM	SiCl4 post valve closed
5/1/2012	1:10:03 PM	Bypass valve closed
5/1/2012	1:10:03 PM	Bubbler valve closed
5/1/2012	1:10:03 PM	Helium valve opened
5/1/2012	1:10:03 PM	Main Vac valve opened
5/1/2012	1:10:03 PM	Helium MFC set to  20.000000
5/1/2012	1:10:03 PM	H2 MFC set to  0.000000
5/1/2012	1:10:03 PM	BCl3 MFC set to  0.000000
5/1/2012	1:10:03 PM	PH3 MFC set to  0.000000
5/1/2012	1:10:03 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:10:03 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:10:03 PM	Tube furnace set to 0
5/1/2012	1:10:33 PM	Helium valve closed
5/1/2012	1:10:33 PM	H2 valve closed
5/1/2012	1:10:33 PM	BCl3 valve closed
5/1/2012	1:10:33 PM	PH3 valve closed
5/1/2012	1:10:33 PM	SiCl4 pre valve closed
5/1/2012	1:10:33 PM	SiCl4 post valve closed
5/1/2012	1:10:33 PM	Bypass valve closed
5/1/2012	1:10:33 PM	Bubbler valve closed
5/1/2012	1:10:33 PM	Main Vac valve opened
5/1/2012	1:10:33 PM	Helium MFC set to  0.000000
5/1/2012	1:10:33 PM	H2 MFC set to  0.000000
5/1/2012	1:10:33 PM	BCl3 MFC set to  0.000000
5/1/2012	1:10:33 PM	PH3 MFC set to  0.000000
5/1/2012	1:10:33 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:10:33 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:10:33 PM	Tube furnace set to 0
5/1/2012	1:11:03 PM	H2 valve closed
5/1/2012	1:11:03 PM	BCl3 valve closed
5/1/2012	1:11:03 PM	PH3 valve closed
5/1/2012	1:11:03 PM	SiCl4 pre valve closed
5/1/2012	1:11:03 PM	SiCl4 post valve closed
5/1/2012	1:11:03 PM	Bypass valve closed
5/1/2012	1:11:03 PM	Bubbler valve closed
5/1/2012	1:11:03 PM	Helium valve opened
5/1/2012	1:11:03 PM	Main Vac valve opened
5/1/2012	1:11:03 PM	Helium MFC set to  20.000000
5/1/2012	1:11:03 PM	H2 MFC set to  0.000000
5/1/2012	1:11:03 PM	BCl3 MFC set to  0.000000
5/1/2012	1:11:03 PM	PH3 MFC set to  0.000000
5/1/2012	1:11:03 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:11:03 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:11:04 PM	Tube furnace set to 0
5/1/2012	1:11:34 PM	Helium valve closed
5/1/2012	1:11:34 PM	H2 valve closed
5/1/2012	1:11:34 PM	BCl3 valve closed
5/1/2012	1:11:34 PM	PH3 valve closed
5/1/2012	1:11:34 PM	SiCl4 pre valve closed
5/1/2012	1:11:34 PM	SiCl4 post valve closed
5/1/2012	1:11:34 PM	Bypass valve closed
5/1/2012	1:11:34 PM	Bubbler valve closed
5/1/2012	1:11:34 PM	Main Vac valve opened
5/1/2012	1:11:34 PM	Helium MFC set to  0.000000
5/1/2012	1:11:34 PM	H2 MFC set to  0.000000
5/1/2012	1:11:34 PM	BCl3 MFC set to  0.000000
5/1/2012	1:11:34 PM	PH3 MFC set to  0.000000
5/1/2012	1:11:34 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:11:34 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:11:34 PM	Tube furnace set to 0
5/1/2012	1:12:04 PM	H2 valve closed
5/1/2012	1:12:04 PM	BCl3 valve closed
5/1/2012	1:12:04 PM	PH3 valve closed
5/1/2012	1:12:04 PM	SiCl4 pre valve closed
5/1/2012	1:12:04 PM	SiCl4 post valve closed
5/1/2012	1:12:04 PM	Bypass valve closed
5/1/2012	1:12:04 PM	Bubbler valve closed
5/1/2012	1:12:04 PM	Helium valve opened
5/1/2012	1:12:04 PM	Main Vac valve opened
5/1/2012	1:12:04 PM	Helium MFC set to  20.000000
5/1/2012	1:12:04 PM	H2 MFC set to  0.000000
5/1/2012	1:12:04 PM	BCl3 MFC set to  0.000000
5/1/2012	1:12:04 PM	PH3 MFC set to  0.000000
5/1/2012	1:12:04 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:12:04 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:12:04 PM	Tube furnace set to 0
5/1/2012	1:12:34 PM	Helium valve closed
5/1/2012	1:12:34 PM	H2 valve closed
5/1/2012	1:12:34 PM	BCl3 valve closed
5/1/2012	1:12:34 PM	PH3 valve closed
5/1/2012	1:12:34 PM	SiCl4 pre valve closed
5/1/2012	1:12:34 PM	SiCl4 post valve closed
5/1/2012	1:12:34 PM	Bypass valve closed
5/1/2012	1:12:34 PM	Bubbler valve closed
5/1/2012	1:12:34 PM	Main Vac valve opened
5/1/2012	1:12:34 PM	Helium MFC set to  0.000000
5/1/2012	1:12:34 PM	H2 MFC set to  0.000000
5/1/2012	1:12:34 PM	BCl3 MFC set to  0.000000
5/1/2012	1:12:34 PM	PH3 MFC set to  0.000000
5/1/2012	1:12:34 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:12:34 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:12:34 PM	Tube furnace set to 0
5/1/2012	1:13:04 PM	H2 valve closed
5/1/2012	1:13:04 PM	BCl3 valve closed
5/1/2012	1:13:04 PM	PH3 valve closed
5/1/2012	1:13:04 PM	SiCl4 pre valve closed
5/1/2012	1:13:04 PM	SiCl4 post valve closed
5/1/2012	1:13:04 PM	Bypass valve closed
5/1/2012	1:13:04 PM	Bubbler valve closed
5/1/2012	1:13:04 PM	Helium valve opened
5/1/2012	1:13:04 PM	Main Vac valve opened
5/1/2012	1:13:04 PM	Helium MFC set to  20.000000
5/1/2012	1:13:04 PM	H2 MFC set to  0.000000
5/1/2012	1:13:04 PM	BCl3 MFC set to  0.000000
5/1/2012	1:13:04 PM	PH3 MFC set to  0.000000
5/1/2012	1:13:04 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:13:04 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:13:04 PM	Tube furnace set to 0
5/1/2012	1:13:35 PM	Helium valve closed
5/1/2012	1:13:35 PM	H2 valve closed
5/1/2012	1:13:35 PM	BCl3 valve closed
5/1/2012	1:13:35 PM	PH3 valve closed
5/1/2012	1:13:35 PM	SiCl4 pre valve closed
5/1/2012	1:13:35 PM	SiCl4 post valve closed
5/1/2012	1:13:35 PM	Bypass valve closed
5/1/2012	1:13:35 PM	Bubbler valve closed
5/1/2012	1:13:35 PM	Main Vac valve opened
5/1/2012	1:13:35 PM	Helium MFC set to  0.000000
5/1/2012	1:13:35 PM	H2 MFC set to  0.000000
5/1/2012	1:13:35 PM	BCl3 MFC set to  0.000000
5/1/2012	1:13:35 PM	PH3 MFC set to  0.000000
5/1/2012	1:13:35 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:13:35 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:13:35 PM	Tube furnace set to 0
5/1/2012	1:14:05 PM	H2 valve closed
5/1/2012	1:14:05 PM	BCl3 valve closed
5/1/2012	1:14:05 PM	PH3 valve closed
5/1/2012	1:14:05 PM	SiCl4 pre valve closed
5/1/2012	1:14:05 PM	SiCl4 post valve closed
5/1/2012	1:14:05 PM	Bypass valve closed
5/1/2012	1:14:05 PM	Bubbler valve closed
5/1/2012	1:14:05 PM	Helium valve opened
5/1/2012	1:14:05 PM	Main Vac valve opened
5/1/2012	1:14:05 PM	Helium MFC set to  20.000000
5/1/2012	1:14:05 PM	H2 MFC set to  0.000000
5/1/2012	1:14:05 PM	BCl3 MFC set to  0.000000
5/1/2012	1:14:05 PM	PH3 MFC set to  0.000000
5/1/2012	1:14:05 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:14:05 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:14:05 PM	Tube furnace set to 0
5/1/2012	1:14:35 PM	Helium valve closed
5/1/2012	1:14:35 PM	H2 valve closed
5/1/2012	1:14:35 PM	BCl3 valve closed
5/1/2012	1:14:35 PM	PH3 valve closed
5/1/2012	1:14:35 PM	SiCl4 pre valve closed
5/1/2012	1:14:35 PM	SiCl4 post valve closed
5/1/2012	1:14:35 PM	Bypass valve closed
5/1/2012	1:14:35 PM	Bubbler valve closed
5/1/2012	1:14:35 PM	Main Vac valve opened
5/1/2012	1:14:35 PM	Helium MFC set to  0.000000
5/1/2012	1:14:35 PM	H2 MFC set to  0.000000
5/1/2012	1:14:35 PM	BCl3 MFC set to  0.000000
5/1/2012	1:14:35 PM	PH3 MFC set to  0.000000
5/1/2012	1:14:35 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:14:35 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:14:35 PM	Tube furnace set to 0
5/1/2012	1:15:05 PM	H2 valve closed
5/1/2012	1:15:05 PM	BCl3 valve closed
5/1/2012	1:15:05 PM	PH3 valve closed
5/1/2012	1:15:05 PM	SiCl4 pre valve closed
5/1/2012	1:15:05 PM	SiCl4 post valve closed
5/1/2012	1:15:05 PM	Bypass valve closed
5/1/2012	1:15:05 PM	Bubbler valve closed
5/1/2012	1:15:05 PM	Helium valve opened
5/1/2012	1:15:05 PM	Main Vac valve opened
5/1/2012	1:15:05 PM	Helium MFC set to  20.000000
5/1/2012	1:15:05 PM	H2 MFC set to  0.000000
5/1/2012	1:15:05 PM	BCl3 MFC set to  0.000000
5/1/2012	1:15:05 PM	PH3 MFC set to  0.000000
5/1/2012	1:15:05 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:15:05 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:15:05 PM	Tube furnace set to 0
5/1/2012	1:15:35 PM	Helium valve closed
5/1/2012	1:15:35 PM	H2 valve closed
5/1/2012	1:15:35 PM	BCl3 valve closed
5/1/2012	1:15:35 PM	PH3 valve closed
5/1/2012	1:15:35 PM	SiCl4 pre valve closed
5/1/2012	1:15:35 PM	SiCl4 post valve closed
5/1/2012	1:15:35 PM	Bypass valve closed
5/1/2012	1:15:35 PM	Bubbler valve closed
5/1/2012	1:15:35 PM	Main Vac valve opened
5/1/2012	1:15:36 PM	Helium MFC set to  0.000000
5/1/2012	1:15:36 PM	H2 MFC set to  0.000000
5/1/2012	1:15:36 PM	BCl3 MFC set to  0.000000
5/1/2012	1:15:36 PM	PH3 MFC set to  0.000000
5/1/2012	1:15:36 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:15:36 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:15:36 PM	Tube furnace set to 0
5/1/2012	1:16:06 PM	H2 valve closed
5/1/2012	1:16:06 PM	BCl3 valve closed
5/1/2012	1:16:06 PM	PH3 valve closed
5/1/2012	1:16:06 PM	SiCl4 pre valve closed
5/1/2012	1:16:06 PM	SiCl4 post valve closed
5/1/2012	1:16:06 PM	Bypass valve closed
5/1/2012	1:16:06 PM	Bubbler valve closed
5/1/2012	1:16:06 PM	Helium valve opened
5/1/2012	1:16:06 PM	Main Vac valve opened
5/1/2012	1:16:06 PM	Helium MFC set to  20.000000
5/1/2012	1:16:06 PM	H2 MFC set to  0.000000
5/1/2012	1:16:06 PM	BCl3 MFC set to  0.000000
5/1/2012	1:16:06 PM	PH3 MFC set to  0.000000
5/1/2012	1:16:06 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:16:06 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:16:06 PM	Tube furnace set to 0
5/1/2012	1:16:36 PM	Helium valve closed
5/1/2012	1:16:36 PM	H2 valve closed
5/1/2012	1:16:36 PM	BCl3 valve closed
5/1/2012	1:16:36 PM	PH3 valve closed
5/1/2012	1:16:36 PM	SiCl4 pre valve closed
5/1/2012	1:16:36 PM	SiCl4 post valve closed
5/1/2012	1:16:36 PM	Bypass valve closed
5/1/2012	1:16:36 PM	Bubbler valve closed
5/1/2012	1:16:36 PM	Main Vac valve opened
5/1/2012	1:16:36 PM	Helium MFC set to  0.000000
5/1/2012	1:16:36 PM	H2 MFC set to  0.000000
5/1/2012	1:16:36 PM	BCl3 MFC set to  0.000000
5/1/2012	1:16:36 PM	PH3 MFC set to  0.000000
5/1/2012	1:16:36 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:16:36 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:16:36 PM	Tube furnace set to 0
5/1/2012	1:16:37 PM	Run finished at 1:16 PM
5/1/2012	1:16:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/1/2012	1:25:16 PM	Main Vac valve closed
5/1/2012	1:26:19 PM	Main Vac valve opened
5/1/2012	1:27:10 PM	Main Vac valve closed
5/1/2012	1:27:20 PM	Main Vac valve opened
5/1/2012	1:27:59 PM	Recipe started at 1:27 PM
5/1/2012	1:27:59 PM	Helium valve closed
5/1/2012	1:27:59 PM	H2 valve closed
5/1/2012	1:27:59 PM	BCl3 valve closed
5/1/2012	1:27:59 PM	PH3 valve closed
5/1/2012	1:27:59 PM	SiCl4 pre valve closed
5/1/2012	1:27:59 PM	SiCl4 post valve closed
5/1/2012	1:27:59 PM	Main Vac valve closed
5/1/2012	1:27:59 PM	Bypass valve closed
5/1/2012	1:27:59 PM	Bubbler valve closed
5/1/2012	1:27:59 PM	Helium MFC set to  0.000000
5/1/2012	1:27:59 PM	H2 MFC set to  0.000000
5/1/2012	1:27:59 PM	BCl3 MFC set to  0.000000
5/1/2012	1:27:59 PM	PH3 MFC set to  0.000000
5/1/2012	1:27:59 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:27:59 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:27:59 PM	Tube furnace set to 0
5/1/2012	1:28:02 PM	Helium valve closed
5/1/2012	1:28:02 PM	BCl3 valve closed
5/1/2012	1:28:02 PM	PH3 valve closed
5/1/2012	1:28:02 PM	SiCl4 pre valve closed
5/1/2012	1:28:02 PM	SiCl4 post valve closed
5/1/2012	1:28:02 PM	Main Vac valve closed
5/1/2012	1:28:02 PM	Bypass valve closed
5/1/2012	1:28:02 PM	Bubbler valve closed
5/1/2012	1:28:02 PM	H2 valve opened
5/1/2012	1:28:02 PM	Helium MFC set to  0.000000
5/1/2012	1:28:02 PM	H2 MFC set to  500.000000
5/1/2012	1:28:02 PM	BCl3 MFC set to  0.000000
5/1/2012	1:28:02 PM	PH3 MFC set to  0.000000
5/1/2012	1:28:02 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:28:02 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:28:02 PM	Tube furnace set to 0
5/1/2012	1:29:18 PM	Helium valve closed
5/1/2012	1:29:18 PM	BCl3 valve closed
5/1/2012	1:29:18 PM	PH3 valve closed
5/1/2012	1:29:18 PM	SiCl4 pre valve closed
5/1/2012	1:29:18 PM	SiCl4 post valve closed
5/1/2012	1:29:18 PM	Main Vac valve closed
5/1/2012	1:29:18 PM	Bypass valve closed
5/1/2012	1:29:18 PM	H2 valve opened
5/1/2012	1:29:18 PM	Bubbler valve opened
5/1/2012	1:29:18 PM	Helium MFC set to  0.000000
5/1/2012	1:29:18 PM	H2 MFC set to  500.000000
5/1/2012	1:29:18 PM	BCl3 MFC set to  0.000000
5/1/2012	1:29:18 PM	PH3 MFC set to  0.000000
5/1/2012	1:29:18 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:29:18 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:29:18 PM	Tube furnace set to 0
5/1/2012	1:29:19 PM	Helium valve closed
5/1/2012	1:29:19 PM	BCl3 valve closed
5/1/2012	1:29:19 PM	PH3 valve closed
5/1/2012	1:29:19 PM	SiCl4 pre valve closed
5/1/2012	1:29:19 PM	SiCl4 post valve closed
5/1/2012	1:29:19 PM	Main Vac valve closed
5/1/2012	1:29:19 PM	Bypass valve closed
5/1/2012	1:29:19 PM	H2 valve opened
5/1/2012	1:29:19 PM	Bubbler valve opened
5/1/2012	1:29:19 PM	Helium MFC set to  0.000000
5/1/2012	1:29:19 PM	H2 MFC set to  500.000000
5/1/2012	1:29:19 PM	BCl3 MFC set to  0.000000
5/1/2012	1:29:19 PM	PH3 MFC set to  0.000000
5/1/2012	1:29:19 PM	SiCl4 MFC set to  0.000000
5/1/2012	1:29:19 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:29:19 PM	Tube furnace set to 1000
5/1/2012	1:49:19 PM	Helium valve closed
5/1/2012	1:49:19 PM	PH3 valve closed
5/1/2012	1:49:19 PM	Main Vac valve closed
5/1/2012	1:49:19 PM	Bypass valve closed
5/1/2012	1:49:19 PM	H2 valve opened
5/1/2012	1:49:19 PM	BCl3 valve opened
5/1/2012	1:49:19 PM	SiCl4 pre valve opened
5/1/2012	1:49:19 PM	SiCl4 post valve opened
5/1/2012	1:49:19 PM	Bubbler valve opened
5/1/2012	1:49:19 PM	Helium MFC set to  0.000000
5/1/2012	1:49:19 PM	H2 MFC set to  500.000000
5/1/2012	1:49:19 PM	BCl3 MFC set to  1.000000
5/1/2012	1:49:19 PM	PH3 MFC set to  0.000000
5/1/2012	1:49:19 PM	SiCl4 MFC set to  50.000000
5/1/2012	1:49:19 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	1:49:19 PM	Tube furnace set to 1000
5/1/2012	2:09:19 PM	Helium valve closed
5/1/2012	2:09:19 PM	BCl3 valve closed
5/1/2012	2:09:19 PM	PH3 valve closed
5/1/2012	2:09:19 PM	SiCl4 pre valve closed
5/1/2012	2:09:19 PM	SiCl4 post valve closed
5/1/2012	2:09:19 PM	Main Vac valve closed
5/1/2012	2:09:19 PM	Bypass valve closed
5/1/2012	2:09:19 PM	H2 valve opened
5/1/2012	2:09:19 PM	Bubbler valve opened
5/1/2012	2:09:19 PM	Helium MFC set to  0.000000
5/1/2012	2:09:19 PM	H2 MFC set to  500.000000
5/1/2012	2:09:19 PM	BCl3 MFC set to  0.000000
5/1/2012	2:09:19 PM	PH3 MFC set to  0.000000
5/1/2012	2:09:19 PM	SiCl4 MFC set to  0.000000
5/1/2012	2:09:19 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	2:09:19 PM	Tube furnace set to 750
5/1/2012	2:14:19 PM	H2 valve closed
5/1/2012	2:14:19 PM	BCl3 valve closed
5/1/2012	2:14:19 PM	PH3 valve closed
5/1/2012	2:14:19 PM	SiCl4 pre valve closed
5/1/2012	2:14:19 PM	SiCl4 post valve closed
5/1/2012	2:14:19 PM	Main Vac valve closed
5/1/2012	2:14:19 PM	Bypass valve closed
5/1/2012	2:14:19 PM	Helium valve opened
5/1/2012	2:14:19 PM	Bubbler valve opened
5/1/2012	2:14:19 PM	Helium MFC set to  500.000000
5/1/2012	2:14:19 PM	H2 MFC set to  0.000000
5/1/2012	2:14:19 PM	BCl3 MFC set to  0.000000
5/1/2012	2:14:19 PM	PH3 MFC set to  0.000000
5/1/2012	2:14:19 PM	SiCl4 MFC set to  0.000000
5/1/2012	2:14:19 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	2:14:20 PM	Tube furnace set to 0
5/1/2012	2:29:28 PM	Run aborted at 2:29 PM
5/1/2012	2:29:28 PM	Helium valve closed
5/1/2012	2:29:28 PM	H2 valve closed
5/1/2012	2:29:28 PM	BCl3 valve closed
5/1/2012	2:29:28 PM	PH3 valve closed
5/1/2012	2:29:28 PM	SiCl4 pre valve closed
5/1/2012	2:29:28 PM	SiCl4 post valve closed
5/1/2012	2:29:28 PM	Bypass valve closed
5/1/2012	2:29:28 PM	Main Vac valve closed
5/1/2012	2:29:28 PM	Bubbler valve closed
5/1/2012	2:29:28 PM	Helium MFC set to  0.000000
5/1/2012	2:29:28 PM	H2 MFC set to  0.000000
5/1/2012	2:29:28 PM	BCl3 MFC set to  0.000000
5/1/2012	2:29:28 PM	PH3 MFC set to  0.000000
5/1/2012	2:29:28 PM	SiCl4 MFC set to  0.000000
5/1/2012	2:29:28 PM	Tube furnace set to 0
5/1/2012	2:29:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	2:29:32 PM	Recipe started at 2:29 PM
5/1/2012	2:29:32 PM	Helium valve closed
5/1/2012	2:29:32 PM	H2 valve closed
5/1/2012	2:29:32 PM	BCl3 valve closed
5/1/2012	2:29:32 PM	PH3 valve closed
5/1/2012	2:29:32 PM	SiCl4 pre valve closed
5/1/2012	2:29:32 PM	SiCl4 post valve closed
5/1/2012	2:29:32 PM	Main Vac valve closed
5/1/2012	2:29:32 PM	Bypass valve closed
5/1/2012	2:29:32 PM	Bubbler valve closed
5/1/2012	2:29:32 PM	Helium MFC set to  0.000000
5/1/2012	2:29:32 PM	H2 MFC set to  0.000000
5/1/2012	2:29:32 PM	BCl3 MFC set to  0.000000
5/1/2012	2:29:32 PM	PH3 MFC set to  0.000000
5/1/2012	2:29:32 PM	SiCl4 MFC set to  0.000000
5/1/2012	2:29:32 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	2:29:32 PM	Tube furnace set to 0
5/1/2012	2:29:35 PM	H2 valve closed
5/1/2012	2:29:35 PM	BCl3 valve closed
5/1/2012	2:29:35 PM	PH3 valve closed
5/1/2012	2:29:35 PM	SiCl4 pre valve closed
5/1/2012	2:29:35 PM	SiCl4 post valve closed
5/1/2012	2:29:35 PM	Main Vac valve closed
5/1/2012	2:29:35 PM	Bypass valve closed
5/1/2012	2:29:35 PM	Bubbler valve closed
5/1/2012	2:29:35 PM	Helium valve opened
5/1/2012	2:29:35 PM	Helium MFC set to  500.000000
5/1/2012	2:29:35 PM	H2 MFC set to  0.000000
5/1/2012	2:29:35 PM	BCl3 MFC set to  0.000000
5/1/2012	2:29:35 PM	PH3 MFC set to  0.000000
5/1/2012	2:29:35 PM	SiCl4 MFC set to  0.000000
5/1/2012	2:29:35 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	2:29:36 PM	Tube furnace set to 0
5/1/2012	2:29:36 PM	Helium valve closed
5/1/2012	2:29:36 PM	H2 valve closed
5/1/2012	2:29:36 PM	BCl3 valve closed
5/1/2012	2:29:36 PM	PH3 valve closed
5/1/2012	2:29:36 PM	SiCl4 pre valve closed
5/1/2012	2:29:36 PM	SiCl4 post valve closed
5/1/2012	2:29:36 PM	Main Vac valve closed
5/1/2012	2:29:36 PM	Bypass valve closed
5/1/2012	2:29:36 PM	Bubbler valve closed
5/1/2012	2:29:36 PM	Helium MFC set to  0.000000
5/1/2012	2:29:36 PM	H2 MFC set to  0.000000
5/1/2012	2:29:36 PM	BCl3 MFC set to  0.000000
5/1/2012	2:29:36 PM	PH3 MFC set to  0.000000
5/1/2012	2:29:36 PM	SiCl4 MFC set to  0.000000
5/1/2012	2:29:36 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	2:29:36 PM	Tube furnace set to 0
5/1/2012	2:29:37 PM	Run finished at 2:29 PM
5/1/2012	2:29:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	2:39:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	2:39:55 PM	Recipe started at 2:39 PM
5/1/2012	2:39:55 PM	Helium valve closed
5/1/2012	2:39:55 PM	H2 valve closed
5/1/2012	2:39:55 PM	BCl3 valve closed
5/1/2012	2:39:55 PM	PH3 valve closed
5/1/2012	2:39:55 PM	SiCl4 pre valve closed
5/1/2012	2:39:55 PM	SiCl4 post valve closed
5/1/2012	2:39:55 PM	Main Vac valve closed
5/1/2012	2:39:55 PM	Bubbler valve closed
5/1/2012	2:39:55 PM	Bypass valve opened
5/1/2012	2:39:55 PM	Helium MFC set to  0.000000
5/1/2012	2:39:55 PM	H2 MFC set to  0.000000
5/1/2012	2:39:55 PM	BCl3 MFC set to  0.000000
5/1/2012	2:39:55 PM	PH3 MFC set to  0.000000
5/1/2012	2:39:55 PM	SiCl4 MFC set to  0.000000
5/1/2012	2:39:55 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	2:39:55 PM	Tube furnace set to 0
5/1/2012	2:41:08 PM	Helium valve closed
5/1/2012	2:41:08 PM	H2 valve closed
5/1/2012	2:41:08 PM	BCl3 valve closed
5/1/2012	2:41:08 PM	PH3 valve closed
5/1/2012	2:41:08 PM	SiCl4 pre valve closed
5/1/2012	2:41:08 PM	SiCl4 post valve closed
5/1/2012	2:41:08 PM	Main Vac valve closed
5/1/2012	2:41:08 PM	Bubbler valve closed
5/1/2012	2:41:08 PM	Bypass valve opened
5/1/2012	2:41:08 PM	Helium MFC set to  0.000000
5/1/2012	2:41:08 PM	H2 MFC set to  0.000000
5/1/2012	2:41:08 PM	BCl3 MFC set to  0.000000
5/1/2012	2:41:08 PM	PH3 MFC set to  0.000000
5/1/2012	2:41:08 PM	SiCl4 MFC set to  0.000000
5/1/2012	2:41:08 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	2:41:08 PM	Tube furnace set to 0
5/1/2012	2:42:08 PM	Helium valve closed
5/1/2012	2:42:08 PM	H2 valve closed
5/1/2012	2:42:08 PM	BCl3 valve closed
5/1/2012	2:42:08 PM	PH3 valve closed
5/1/2012	2:42:08 PM	SiCl4 pre valve closed
5/1/2012	2:42:08 PM	SiCl4 post valve closed
5/1/2012	2:42:08 PM	Bypass valve closed
5/1/2012	2:42:08 PM	Bubbler valve closed
5/1/2012	2:42:08 PM	Main Vac valve opened
5/1/2012	2:42:08 PM	Helium MFC set to  0.000000
5/1/2012	2:42:08 PM	H2 MFC set to  0.000000
5/1/2012	2:42:08 PM	BCl3 MFC set to  0.000000
5/1/2012	2:42:08 PM	PH3 MFC set to  0.000000
5/1/2012	2:42:08 PM	SiCl4 MFC set to  0.000000
5/1/2012	2:42:08 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	2:42:08 PM	Tube furnace set to 0
5/1/2012	2:42:09 PM	Run finished at 2:42 PM
5/1/2012	2:42:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	6:08:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	6:08:54 PM	Recipe started at 6:08 PM
5/1/2012	6:08:54 PM	Helium valve closed
5/1/2012	6:08:54 PM	H2 valve closed
5/1/2012	6:08:54 PM	BCl3 valve closed
5/1/2012	6:08:54 PM	PH3 valve closed
5/1/2012	6:08:54 PM	SiCl4 pre valve closed
5/1/2012	6:08:54 PM	SiCl4 post valve closed
5/1/2012	6:08:54 PM	Main Vac valve closed
5/1/2012	6:08:54 PM	Bypass valve closed
5/1/2012	6:08:54 PM	Bubbler valve closed
5/1/2012	6:08:54 PM	Helium MFC set to  0.000000
5/1/2012	6:08:54 PM	H2 MFC set to  0.000000
5/1/2012	6:08:54 PM	BCl3 MFC set to  0.000000
5/1/2012	6:08:54 PM	PH3 MFC set to  0.000000
5/1/2012	6:08:54 PM	SiCl4 MFC set to  0.000000
5/1/2012	6:08:54 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	6:08:54 PM	Tube furnace set to 0
5/1/2012	6:08:57 PM	H2 valve closed
5/1/2012	6:08:57 PM	BCl3 valve closed
5/1/2012	6:08:57 PM	PH3 valve closed
5/1/2012	6:08:57 PM	SiCl4 pre valve closed
5/1/2012	6:08:57 PM	SiCl4 post valve closed
5/1/2012	6:08:57 PM	Main Vac valve closed
5/1/2012	6:08:57 PM	Bypass valve closed
5/1/2012	6:08:57 PM	Bubbler valve closed
5/1/2012	6:08:57 PM	Helium valve opened
5/1/2012	6:08:57 PM	Helium MFC set to  500.000000
5/1/2012	6:08:57 PM	H2 MFC set to  0.000000
5/1/2012	6:08:57 PM	BCl3 MFC set to  0.000000
5/1/2012	6:08:57 PM	PH3 MFC set to  0.000000
5/1/2012	6:08:57 PM	SiCl4 MFC set to  0.000000
5/1/2012	6:08:57 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	6:08:57 PM	Tube furnace set to 0
5/1/2012	6:09:52 PM	Run aborted at 6:09 PM
5/1/2012	6:09:52 PM	Helium valve closed
5/1/2012	6:09:52 PM	H2 valve closed
5/1/2012	6:09:52 PM	BCl3 valve closed
5/1/2012	6:09:52 PM	PH3 valve closed
5/1/2012	6:09:52 PM	SiCl4 pre valve closed
5/1/2012	6:09:52 PM	SiCl4 post valve closed
5/1/2012	6:09:52 PM	Bypass valve closed
5/1/2012	6:09:52 PM	Main Vac valve closed
5/1/2012	6:09:52 PM	Bubbler valve closed
5/1/2012	6:09:52 PM	Helium MFC set to  0.000000
5/1/2012	6:09:52 PM	H2 MFC set to  0.000000
5/1/2012	6:09:52 PM	BCl3 MFC set to  0.000000
5/1/2012	6:09:52 PM	PH3 MFC set to  0.000000
5/1/2012	6:09:52 PM	SiCl4 MFC set to  0.000000
5/1/2012	6:09:52 PM	Tube furnace set to 0
5/1/2012	6:09:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	6:09:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	6:09:56 PM	Recipe started at 6:09 PM
5/1/2012	6:09:56 PM	Helium valve closed
5/1/2012	6:09:56 PM	H2 valve closed
5/1/2012	6:09:56 PM	BCl3 valve closed
5/1/2012	6:09:56 PM	PH3 valve closed
5/1/2012	6:09:56 PM	SiCl4 pre valve closed
5/1/2012	6:09:56 PM	SiCl4 post valve closed
5/1/2012	6:09:56 PM	Main Vac valve closed
5/1/2012	6:09:56 PM	Bubbler valve closed
5/1/2012	6:09:56 PM	Bypass valve opened
5/1/2012	6:09:56 PM	Helium MFC set to  0.000000
5/1/2012	6:09:56 PM	H2 MFC set to  0.000000
5/1/2012	6:09:56 PM	BCl3 MFC set to  0.000000
5/1/2012	6:09:56 PM	PH3 MFC set to  0.000000
5/1/2012	6:09:56 PM	SiCl4 MFC set to  0.000000
5/1/2012	6:09:56 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	6:09:56 PM	Tube furnace set to 0
5/1/2012	6:10:53 PM	Helium valve closed
5/1/2012	6:10:53 PM	H2 valve closed
5/1/2012	6:10:53 PM	BCl3 valve closed
5/1/2012	6:10:53 PM	PH3 valve closed
5/1/2012	6:10:53 PM	SiCl4 pre valve closed
5/1/2012	6:10:53 PM	SiCl4 post valve closed
5/1/2012	6:10:53 PM	Main Vac valve closed
5/1/2012	6:10:53 PM	Bubbler valve closed
5/1/2012	6:10:53 PM	Bypass valve opened
5/1/2012	6:10:53 PM	Helium MFC set to  0.000000
5/1/2012	6:10:53 PM	H2 MFC set to  0.000000
5/1/2012	6:10:53 PM	BCl3 MFC set to  0.000000
5/1/2012	6:10:53 PM	PH3 MFC set to  0.000000
5/1/2012	6:10:53 PM	SiCl4 MFC set to  0.000000
5/1/2012	6:10:53 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	6:10:53 PM	Tube furnace set to 0
5/1/2012	6:11:46 PM	Helium valve closed
5/1/2012	6:11:46 PM	H2 valve closed
5/1/2012	6:11:46 PM	BCl3 valve closed
5/1/2012	6:11:46 PM	PH3 valve closed
5/1/2012	6:11:46 PM	SiCl4 pre valve closed
5/1/2012	6:11:46 PM	SiCl4 post valve closed
5/1/2012	6:11:46 PM	Bypass valve closed
5/1/2012	6:11:46 PM	Bubbler valve closed
5/1/2012	6:11:46 PM	Main Vac valve opened
5/1/2012	6:11:46 PM	Helium MFC set to  0.000000
5/1/2012	6:11:46 PM	H2 MFC set to  0.000000
5/1/2012	6:11:46 PM	BCl3 MFC set to  0.000000
5/1/2012	6:11:46 PM	PH3 MFC set to  0.000000
5/1/2012	6:11:46 PM	SiCl4 MFC set to  0.000000
5/1/2012	6:11:46 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	6:11:46 PM	Tube furnace set to 0
5/1/2012	6:11:47 PM	Run finished at 6:11 PM
5/1/2012	6:11:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	6:55:05 PM	Helium MFC set to  100.000000
5/1/2012	6:55:08 PM	Main Vac valve closed
5/1/2012	6:55:09 PM	Helium valve opened
5/1/2012	6:55:23 PM	Helium valve closed
5/1/2012	6:55:24 PM	Bypass valve opened
5/1/2012	6:56:11 PM	Bypass valve closed
5/1/2012	6:56:12 PM	Main Vac valve opened
5/1/2012	7:09:08 PM	Main Vac valve closed
5/1/2012	7:09:11 PM	Helium MFC set to  10.000000
5/1/2012	7:09:13 PM	Helium valve opened
5/1/2012	7:09:49 PM	Helium valve closed
5/1/2012	7:09:50 PM	Bypass valve opened
5/1/2012	7:10:16 PM	Bypass valve closed
5/1/2012	7:10:16 PM	Main Vac valve opened
5/1/2012	7:13:36 PM	Main Vac valve closed
5/1/2012	7:13:37 PM	Helium valve opened
5/1/2012	7:13:56 PM	Helium valve closed
5/1/2012	7:13:57 PM	Bypass valve opened
5/1/2012	7:14:05 PM	Bypass valve closed
5/1/2012	7:14:05 PM	Main Vac valve opened
5/1/2012	7:19:09 PM	Helium MFC set to  10.000000
5/1/2012	7:23:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	7:23:57 PM	Recipe started at 7:23 PM
5/1/2012	7:23:57 PM	Helium valve closed
5/1/2012	7:23:57 PM	H2 valve closed
5/1/2012	7:23:57 PM	BCl3 valve closed
5/1/2012	7:23:57 PM	PH3 valve closed
5/1/2012	7:23:57 PM	SiCl4 pre valve closed
5/1/2012	7:23:57 PM	SiCl4 post valve closed
5/1/2012	7:23:57 PM	Main Vac valve closed
5/1/2012	7:23:57 PM	Bypass valve closed
5/1/2012	7:23:57 PM	Bubbler valve closed
5/1/2012	7:23:57 PM	Helium MFC set to  0.000000
5/1/2012	7:23:57 PM	H2 MFC set to  0.000000
5/1/2012	7:23:57 PM	BCl3 MFC set to  0.000000
5/1/2012	7:23:57 PM	PH3 MFC set to  0.000000
5/1/2012	7:23:57 PM	SiCl4 MFC set to  0.000000
5/1/2012	7:23:57 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	7:23:57 PM	Tube furnace set to 0
5/1/2012	7:24:00 PM	H2 valve closed
5/1/2012	7:24:00 PM	BCl3 valve closed
5/1/2012	7:24:00 PM	PH3 valve closed
5/1/2012	7:24:00 PM	SiCl4 pre valve closed
5/1/2012	7:24:00 PM	SiCl4 post valve closed
5/1/2012	7:24:00 PM	Main Vac valve closed
5/1/2012	7:24:00 PM	Bypass valve closed
5/1/2012	7:24:00 PM	Bubbler valve closed
5/1/2012	7:24:00 PM	Helium valve opened
5/1/2012	7:24:00 PM	Helium MFC set to  500.000000
5/1/2012	7:24:00 PM	H2 MFC set to  0.000000
5/1/2012	7:24:00 PM	BCl3 MFC set to  0.000000
5/1/2012	7:24:00 PM	PH3 MFC set to  0.000000
5/1/2012	7:24:00 PM	SiCl4 MFC set to  0.000000
5/1/2012	7:24:00 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	7:24:01 PM	Tube furnace set to 0
5/1/2012	7:25:14 PM	Helium valve closed
5/1/2012	7:25:14 PM	H2 valve closed
5/1/2012	7:25:14 PM	BCl3 valve closed
5/1/2012	7:25:14 PM	PH3 valve closed
5/1/2012	7:25:14 PM	SiCl4 pre valve closed
5/1/2012	7:25:14 PM	SiCl4 post valve closed
5/1/2012	7:25:14 PM	Main Vac valve closed
5/1/2012	7:25:14 PM	Bypass valve closed
5/1/2012	7:25:14 PM	Bubbler valve closed
5/1/2012	7:25:14 PM	Helium MFC set to  0.000000
5/1/2012	7:25:14 PM	H2 MFC set to  0.000000
5/1/2012	7:25:14 PM	BCl3 MFC set to  0.000000
5/1/2012	7:25:14 PM	PH3 MFC set to  0.000000
5/1/2012	7:25:14 PM	SiCl4 MFC set to  0.000000
5/1/2012	7:25:14 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	7:25:14 PM	Tube furnace set to 0
5/1/2012	7:25:15 PM	Run finished at 7:25 PM
5/1/2012	7:25:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/1/2012	7:30:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	7:30:18 PM	Recipe started at 7:30 PM
5/1/2012	7:30:18 PM	Helium valve closed
5/1/2012	7:30:18 PM	H2 valve closed
5/1/2012	7:30:18 PM	BCl3 valve closed
5/1/2012	7:30:18 PM	PH3 valve closed
5/1/2012	7:30:18 PM	SiCl4 pre valve closed
5/1/2012	7:30:18 PM	SiCl4 post valve closed
5/1/2012	7:30:18 PM	Main Vac valve closed
5/1/2012	7:30:18 PM	Bubbler valve closed
5/1/2012	7:30:18 PM	Bypass valve opened
5/1/2012	7:30:18 PM	Helium MFC set to  0.000000
5/1/2012	7:30:18 PM	H2 MFC set to  0.000000
5/1/2012	7:30:18 PM	BCl3 MFC set to  0.000000
5/1/2012	7:30:18 PM	PH3 MFC set to  0.000000
5/1/2012	7:30:18 PM	SiCl4 MFC set to  0.000000
5/1/2012	7:30:18 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	7:30:18 PM	Tube furnace set to 0
5/1/2012	7:31:27 PM	Helium valve closed
5/1/2012	7:31:27 PM	H2 valve closed
5/1/2012	7:31:27 PM	BCl3 valve closed
5/1/2012	7:31:27 PM	PH3 valve closed
5/1/2012	7:31:27 PM	SiCl4 pre valve closed
5/1/2012	7:31:27 PM	SiCl4 post valve closed
5/1/2012	7:31:27 PM	Main Vac valve closed
5/1/2012	7:31:27 PM	Bubbler valve closed
5/1/2012	7:31:27 PM	Bypass valve opened
5/1/2012	7:31:27 PM	Helium MFC set to  0.000000
5/1/2012	7:31:27 PM	H2 MFC set to  0.000000
5/1/2012	7:31:27 PM	BCl3 MFC set to  0.000000
5/1/2012	7:31:27 PM	PH3 MFC set to  0.000000
5/1/2012	7:31:27 PM	SiCl4 MFC set to  0.000000
5/1/2012	7:31:27 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	7:31:27 PM	Tube furnace set to 0
5/1/2012	7:32:27 PM	Helium valve closed
5/1/2012	7:32:27 PM	H2 valve closed
5/1/2012	7:32:27 PM	BCl3 valve closed
5/1/2012	7:32:27 PM	PH3 valve closed
5/1/2012	7:32:27 PM	SiCl4 pre valve closed
5/1/2012	7:32:27 PM	SiCl4 post valve closed
5/1/2012	7:32:27 PM	Bypass valve closed
5/1/2012	7:32:27 PM	Bubbler valve closed
5/1/2012	7:32:27 PM	Main Vac valve opened
5/1/2012	7:32:27 PM	Helium MFC set to  0.000000
5/1/2012	7:32:27 PM	H2 MFC set to  0.000000
5/1/2012	7:32:27 PM	BCl3 MFC set to  0.000000
5/1/2012	7:32:27 PM	PH3 MFC set to  0.000000
5/1/2012	7:32:27 PM	SiCl4 MFC set to  0.000000
5/1/2012	7:32:27 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	7:32:27 PM	Tube furnace set to 0
5/1/2012	7:32:28 PM	Run finished at 7:32 PM
5/1/2012	7:32:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/1/2012	8:33:53 PM	Main Vac valve closed
5/1/2012	8:34:11 PM	Main Vac valve opened
5/1/2012	8:34:11 PM	Main Vac valve closed
5/1/2012	8:34:12 PM	Main Vac valve opened
5/1/2012	9:34:55 PM	Main Vac valve closed
5/1/2012	9:35:16 PM	Main Vac valve opened
5/1/2012	9:40:30 PM	Recipe started at 9:40 PM
5/1/2012	9:40:30 PM	Helium valve closed
5/1/2012	9:40:30 PM	H2 valve closed
5/1/2012	9:40:30 PM	BCl3 valve closed
5/1/2012	9:40:30 PM	PH3 valve closed
5/1/2012	9:40:30 PM	SiCl4 pre valve closed
5/1/2012	9:40:30 PM	SiCl4 post valve closed
5/1/2012	9:40:30 PM	Bypass valve closed
5/1/2012	9:40:30 PM	Bubbler valve closed
5/1/2012	9:40:30 PM	Main Vac valve opened
5/1/2012	9:40:30 PM	Helium MFC set to  0.000000
5/1/2012	9:40:30 PM	H2 MFC set to  0.000000
5/1/2012	9:40:30 PM	BCl3 MFC set to  0.000000
5/1/2012	9:40:30 PM	PH3 MFC set to  0.000000
5/1/2012	9:40:30 PM	SiCl4 MFC set to  0.000000
5/1/2012	9:40:30 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	9:40:31 PM	Tube furnace set to 0
5/1/2012	9:40:34 PM	Helium valve closed
5/1/2012	9:40:34 PM	H2 valve closed
5/1/2012	9:40:34 PM	BCl3 valve closed
5/1/2012	9:40:34 PM	PH3 valve closed
5/1/2012	9:40:34 PM	SiCl4 pre valve closed
5/1/2012	9:40:34 PM	SiCl4 post valve closed
5/1/2012	9:40:34 PM	Main Vac valve closed
5/1/2012	9:40:34 PM	Bypass valve closed
5/1/2012	9:40:34 PM	Bubbler valve closed
5/1/2012	9:40:34 PM	Helium MFC set to  0.000000
5/1/2012	9:40:34 PM	H2 MFC set to  0.000000
5/1/2012	9:40:34 PM	BCl3 MFC set to  0.000000
5/1/2012	9:40:34 PM	PH3 MFC set to  0.000000
5/1/2012	9:40:34 PM	SiCl4 MFC set to  0.000000
5/1/2012	9:40:34 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	9:40:34 PM	Tube furnace set to 0
5/1/2012	9:40:37 PM	Helium valve closed
5/1/2012	9:40:37 PM	BCl3 valve closed
5/1/2012	9:40:37 PM	PH3 valve closed
5/1/2012	9:40:37 PM	SiCl4 pre valve closed
5/1/2012	9:40:37 PM	SiCl4 post valve closed
5/1/2012	9:40:37 PM	Main Vac valve closed
5/1/2012	9:40:37 PM	Bypass valve closed
5/1/2012	9:40:37 PM	Bubbler valve closed
5/1/2012	9:40:37 PM	H2 valve opened
5/1/2012	9:40:37 PM	Helium MFC set to  0.000000
5/1/2012	9:40:37 PM	H2 MFC set to  500.000000
5/1/2012	9:40:37 PM	BCl3 MFC set to  0.000000
5/1/2012	9:40:37 PM	PH3 MFC set to  0.000000
5/1/2012	9:40:37 PM	SiCl4 MFC set to  0.000000
5/1/2012	9:40:37 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	9:40:37 PM	Tube furnace set to 0
5/1/2012	9:41:54 PM	Helium valve closed
5/1/2012	9:41:54 PM	BCl3 valve closed
5/1/2012	9:41:54 PM	PH3 valve closed
5/1/2012	9:41:54 PM	SiCl4 pre valve closed
5/1/2012	9:41:54 PM	SiCl4 post valve closed
5/1/2012	9:41:54 PM	Main Vac valve closed
5/1/2012	9:41:54 PM	Bypass valve closed
5/1/2012	9:41:54 PM	H2 valve opened
5/1/2012	9:41:54 PM	Bubbler valve opened
5/1/2012	9:41:54 PM	Helium MFC set to  0.000000
5/1/2012	9:41:54 PM	H2 MFC set to  500.000000
5/1/2012	9:41:54 PM	BCl3 MFC set to  0.000000
5/1/2012	9:41:54 PM	PH3 MFC set to  0.000000
5/1/2012	9:41:54 PM	SiCl4 MFC set to  0.000000
5/1/2012	9:41:54 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	9:41:54 PM	Tube furnace set to 1000
5/1/2012	9:41:55 PM	Helium valve closed
5/1/2012	9:41:55 PM	BCl3 valve closed
5/1/2012	9:41:55 PM	PH3 valve closed
5/1/2012	9:41:55 PM	SiCl4 pre valve closed
5/1/2012	9:41:55 PM	SiCl4 post valve closed
5/1/2012	9:41:55 PM	Main Vac valve closed
5/1/2012	9:41:55 PM	Bypass valve closed
5/1/2012	9:41:55 PM	H2 valve opened
5/1/2012	9:41:55 PM	Bubbler valve opened
5/1/2012	9:41:55 PM	Helium MFC set to  0.000000
5/1/2012	9:41:55 PM	H2 MFC set to  500.000000
5/1/2012	9:41:55 PM	BCl3 MFC set to  0.000000
5/1/2012	9:41:55 PM	PH3 MFC set to  0.000000
5/1/2012	9:41:55 PM	SiCl4 MFC set to  0.000000
5/1/2012	9:41:55 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	9:41:55 PM	Tube furnace set to 1000
5/1/2012	10:06:55 PM	Helium valve closed
5/1/2012	10:06:55 PM	BCl3 valve closed
5/1/2012	10:06:55 PM	Main Vac valve closed
5/1/2012	10:06:55 PM	Bypass valve closed
5/1/2012	10:06:55 PM	H2 valve opened
5/1/2012	10:06:55 PM	PH3 valve opened
5/1/2012	10:06:55 PM	SiCl4 pre valve opened
5/1/2012	10:06:55 PM	SiCl4 post valve opened
5/1/2012	10:06:55 PM	Bubbler valve opened
5/1/2012	10:06:55 PM	Helium MFC set to  0.000000
5/1/2012	10:06:55 PM	H2 MFC set to  450.000000
5/1/2012	10:06:55 PM	BCl3 MFC set to  0.000000
5/1/2012	10:06:55 PM	PH3 MFC set to  20.000000
5/1/2012	10:06:55 PM	SiCl4 MFC set to  50.000000
5/1/2012	10:06:55 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	10:06:55 PM	Tube furnace set to 1000
5/1/2012	10:26:55 PM	Helium valve closed
5/1/2012	10:26:55 PM	BCl3 valve closed
5/1/2012	10:26:55 PM	PH3 valve closed
5/1/2012	10:26:55 PM	SiCl4 pre valve closed
5/1/2012	10:26:55 PM	SiCl4 post valve closed
5/1/2012	10:26:55 PM	Main Vac valve closed
5/1/2012	10:26:55 PM	Bypass valve closed
5/1/2012	10:26:55 PM	H2 valve opened
5/1/2012	10:26:55 PM	Bubbler valve opened
5/1/2012	10:26:55 PM	Helium MFC set to  0.000000
5/1/2012	10:26:55 PM	H2 MFC set to  500.000000
5/1/2012	10:26:55 PM	BCl3 MFC set to  0.000000
5/1/2012	10:26:55 PM	PH3 MFC set to  0.000000
5/1/2012	10:26:55 PM	SiCl4 MFC set to  0.000000
5/1/2012	10:26:55 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	10:26:55 PM	Tube furnace set to 100
5/1/2012	10:41:55 PM	H2 valve closed
5/1/2012	10:41:55 PM	BCl3 valve closed
5/1/2012	10:41:55 PM	PH3 valve closed
5/1/2012	10:41:55 PM	SiCl4 pre valve closed
5/1/2012	10:41:55 PM	SiCl4 post valve closed
5/1/2012	10:41:55 PM	Main Vac valve closed
5/1/2012	10:41:55 PM	Bypass valve closed
5/1/2012	10:41:55 PM	Helium valve opened
5/1/2012	10:41:55 PM	Bubbler valve opened
5/1/2012	10:41:55 PM	Helium MFC set to  500.000000
5/1/2012	10:41:55 PM	H2 MFC set to  0.000000
5/1/2012	10:41:55 PM	BCl3 MFC set to  0.000000
5/1/2012	10:41:55 PM	PH3 MFC set to  0.000000
5/1/2012	10:41:55 PM	SiCl4 MFC set to  0.000000
5/1/2012	10:41:55 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	10:41:56 PM	Tube furnace set to 100
5/1/2012	11:01:56 PM	Helium valve closed
5/1/2012	11:01:56 PM	H2 valve closed
5/1/2012	11:01:56 PM	BCl3 valve closed
5/1/2012	11:01:56 PM	PH3 valve closed
5/1/2012	11:01:56 PM	SiCl4 pre valve closed
5/1/2012	11:01:56 PM	SiCl4 post valve closed
5/1/2012	11:01:56 PM	Main Vac valve closed
5/1/2012	11:01:56 PM	Bypass valve closed
5/1/2012	11:01:56 PM	Bubbler valve closed
5/1/2012	11:01:56 PM	Helium MFC set to  0.000000
5/1/2012	11:01:56 PM	H2 MFC set to  0.000000
5/1/2012	11:01:56 PM	BCl3 MFC set to  0.000000
5/1/2012	11:01:56 PM	PH3 MFC set to  0.000000
5/1/2012	11:01:56 PM	SiCl4 MFC set to  0.000000
5/1/2012	11:01:56 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	11:01:56 PM	Tube furnace set to 100
5/1/2012	11:21:56 PM	Helium valve closed
5/1/2012	11:21:56 PM	H2 valve closed
5/1/2012	11:21:56 PM	BCl3 valve closed
5/1/2012	11:21:56 PM	PH3 valve closed
5/1/2012	11:21:56 PM	SiCl4 pre valve closed
5/1/2012	11:21:56 PM	SiCl4 post valve closed
5/1/2012	11:21:56 PM	Main Vac valve closed
5/1/2012	11:21:56 PM	Bubbler valve closed
5/1/2012	11:21:56 PM	Bypass valve opened
5/1/2012	11:21:56 PM	Helium MFC set to  0.000000
5/1/2012	11:21:56 PM	H2 MFC set to  0.000000
5/1/2012	11:21:56 PM	BCl3 MFC set to  0.000000
5/1/2012	11:21:56 PM	PH3 MFC set to  0.000000
5/1/2012	11:21:56 PM	SiCl4 MFC set to  0.000000
5/1/2012	11:21:56 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	11:21:56 PM	Tube furnace set to 100
5/1/2012	11:22:47 PM	Helium valve closed
5/1/2012	11:22:47 PM	H2 valve closed
5/1/2012	11:22:47 PM	BCl3 valve closed
5/1/2012	11:22:47 PM	PH3 valve closed
5/1/2012	11:22:47 PM	SiCl4 pre valve closed
5/1/2012	11:22:47 PM	SiCl4 post valve closed
5/1/2012	11:22:47 PM	Main Vac valve closed
5/1/2012	11:22:47 PM	Bubbler valve closed
5/1/2012	11:22:47 PM	Bypass valve opened
5/1/2012	11:22:47 PM	Helium MFC set to  0.000000
5/1/2012	11:22:47 PM	H2 MFC set to  0.000000
5/1/2012	11:22:47 PM	BCl3 MFC set to  0.000000
5/1/2012	11:22:47 PM	PH3 MFC set to  0.000000
5/1/2012	11:22:47 PM	SiCl4 MFC set to  0.000000
5/1/2012	11:22:47 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	11:22:47 PM	Tube furnace set to 100
5/1/2012	11:23:47 PM	Helium valve closed
5/1/2012	11:23:47 PM	H2 valve closed
5/1/2012	11:23:47 PM	BCl3 valve closed
5/1/2012	11:23:47 PM	PH3 valve closed
5/1/2012	11:23:47 PM	SiCl4 pre valve closed
5/1/2012	11:23:47 PM	SiCl4 post valve closed
5/1/2012	11:23:47 PM	Bypass valve closed
5/1/2012	11:23:47 PM	Bubbler valve closed
5/1/2012	11:23:47 PM	Main Vac valve opened
5/1/2012	11:23:47 PM	Helium MFC set to  0.000000
5/1/2012	11:23:47 PM	H2 MFC set to  0.000000
5/1/2012	11:23:47 PM	BCl3 MFC set to  0.000000
5/1/2012	11:23:47 PM	PH3 MFC set to  0.000000
5/1/2012	11:23:47 PM	SiCl4 MFC set to  0.000000
5/1/2012	11:23:47 PM	Bypass solenoid MFC set to  0.000000
5/1/2012	11:23:48 PM	Tube furnace set to 100
